Synthesis of SiOC:H nanoparticles by electrical discharge in hexamethyldisilazane and water
A. Hamdan, R. A. Halim, D. Anjum, M. S. Cha
Plasma Process Polym., e1700089, (2017)
Characterization of nanomaterial, Nanoparticles, Nanosecond discharge, Plasma in liquids
Nanoparticles have unique properties and are useful in many applications. Efficient synthesis of high yields of nanoparticles remains a challenge. Here, we synthesized SiOC:H, a low-dielectric-constant material, by electrical discharge at the interface of hexamethyldisilazane and water. The nanoparticle production rate of our technique was ∼17 mg per minute. We used Fourier transform infrared spectroscopy, scanning and transmission electron microscopy, and X-ray photoemission spectroscopy to characterize the synthesized material. Heating the nanoparticles to 500 °C for 2 h released hydrogen from CHx groups and evaporated volatile compounds. Our method to produce high yields of low-dielectric-constant nanoparticles for microelectronic applications is promising.
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